Abstract:The invention discloses a grating displacement measuring system based on heterodyne interference and a secondary diffraction effect. The grating displacement measuring system comprises a dual-frequency laser device, an unpolarized beam splitter, a polarized beam splitter, a first reflecting mirror, a second reflecting mirror, a third reflecting mirror, a 1/4 wave plate, a grating, a first polaroid analyzer, a second polaroid analyzer, a first photoelectric detector, a second photoelectric detector, a first front amplifier, a second front amplifier, a frequency mixer, and a subdivision processing circuit, wherein the dual-frequency laser device emits linearly polarized light f1 and f2 with a special frequency difference; f1 is s polarized light, f2 is p polarized light; grating spacing is d and is used for reflection diffraction of incident light; the first polaroid analyzer and the second polaroid analyzer are used for synthesizing new linear polarized light and generating a beat frequency signal; the first photoelectric detector and the second photoelectric detector are used for converting the beat frequency signal into an electric signal; the first front amplifier and the second front amplifier are used for high magnification with automatic gain of the electric signal; the frequency mixer is used for demodulating a frequency shifting signal delta f; the subdivision processing circuit is used for completing subdivision and phase discrimination of the electric signal.

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