A Quadrature Demodulation Method with Digital Subdivision and Averaging for a Heterodyne Interferometer

Jie Zhou,Yanan Yu,Wen He
DOI: https://doi.org/10.1016/j.optlaseng.2024.108495
IF: 5.666
2024-01-01
Optics and Lasers in Engineering
Abstract:A demodulation method including quadrature demodulation, digital subdivision and averaging is presented to perform the reconstruction of the vibration displacement waveform in the primary vibration calibration with nanometer accuracy by simple hardware and algorithms. The quadrature demodulation is applied to the coarse signal processing of the displacement, while the digital subdivision is used for the fine signal processing. The averaging employs the equalization for a series of successively original data, dramatically improving the displacement resolution and greatly decreasing the volume of the original calculation data. The principle for the demodulation method is introduced in detail and simulated by software. The reconstruction of the displacement waveform with a high precision and a high resolution was realized and verified in the experiment.
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