Improved Signal Processing Method for Heterodyne Interferometer

HZ Zhao,Y Zhao
DOI: https://doi.org/10.1117/12.276329
1996-01-01
Abstract:On the basis of the combination of phase measurement and integer periodic phase measurement, a signal processing scheme, which is used for optical heterodyne interferometer with large range, is described. It not only maintains the high measuring resolution , but also enlarges the measuring range, with solving the problem of large range and measurement of dynamic displacement.
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