Design of Two-dimensional PSD Signal Processing System Based on TMS320F2812

SHI Di,SUN Li-qun,ZHANG En-yao
DOI: https://doi.org/10.3969/j.issn.1002-1841.2013.04.012
2013-01-01
Abstract:The two-dimensional PSD signal acquisition and processing system used in digital signal processing TMS320F2812 was designed.TMS320F2812 was used as the main chip in the system,which realized I/V conversion enhancement of PSD output signal,A/D conversion and software calibration,and the function of DSP data acquisition and calculation.The influence of interference signal brought by analog devices was eliminated.The accuracy of 0.01 mm was achieved in ±1 mm range on X、Y directions,which was proved by experiment data.
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