Abstract:Aluminum oxide (Al2O3) films have been investigated for use in various applications, and numerous deposition techniques have been reported. The spray synthesis method has the advantage of forming a thin layer of crystal at low temperatures using the appropriate precursors. A precursor prepared by diluting Methylaluminoxane with N-methyl pyrrolidone was sprayed onto a porous membrane while varying conditions such as the substrate temperature, feeding speed, and spray amount. The solution penetrated the film during spray application, and the ultra-thin layers deposited on the side wall of the internal pores were observed using a cross-sectional transmission electron microscope (XTEM). The lattice image obtained using the TEM and the composition analysis conducted using a scanning TEM and an energy-dispersive X-ray spectroscope suggest that this thin layer is a layer of Al2O3. The formation of Al2O3 occurred at lower temperatures than in previous reports. This is a major advantage for applications with low-melting-point materials. The most suitable spraying conditions were determined based on the state of deposition on the surface and inside the membrane. These conditions were applied to a three-layer separator for lithium-ion batteries and their effect on thermal stability was investigated. Through heating experiments and XRD analysis, it was confirmed that the shrinkage and melting of the separator are suppressed by spraying. This process can be expected to have wide applications in low-melting-point materials such as polyolefin.

Preparation of La2O3 thin films by pulse ultrasonic spray pyrolysis method

Synthesis of LaCrO3 films using spray pyrolysis technique

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Electrical, optical, and structural characteristics of Al2O3 thin films prepared by pulsed ultrasonic sprayed pyrolysis

Characteristics of ZnO Films Prepared by Ultrasonic Spray Pyrolysis Method

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Thulium and ytterbium-doped titanium oxide thin films deposited by ultrasonic spray pyrolysis

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[Study of the Physical Properties of SnS Thin Films Deposited by Ultrasonic Spray Pyrolysis Method].

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Preparation of La 2 NiMnO 6 Thin Films on Pt/TiO 2 /sio 2 /si Substrates by Pulsed Laser Deposition

Growth and characterization of Y2O3 thin films

Synthesis and physical investigation of Al doped La2O3 thin films for wettability applications

Aerosol And Plasma Assisted Chemical Vapor Deposition Process For Multicomponent Oxide Lao(0.8)Sro(0.2)Mno(3) Thin Film

Electrostatic Spray Assembly of Nanostructured La[sub 0.7]Ca[sub 0.3]CrO[sub 3−δ] Films

Preparation of α- Al2 O3 thin films by electron cyclotron resonance plasma-assisted pulsed laser deposition and heat annealing

Uniformly Distributed Fe$_2$O$_3$ Nanoparticles Thin Films Synthesized by Spray Pyrolysis

Surface characterization and catalytic performance of La0.7 Sr0.3MnO3+λ coating deposited by plasma spraying