Piezoelectric Rod Micro Ultrasonic Motor with Shear-bending Modes

Cunyue Lu,Tieying Zhou,Yu Chen,Kai Lu
DOI: https://doi.org/10.1143/JJAP.45.4770
2006-01-01
Abstract:In this paper we propose a new mechanism. for exciting shear-bending vibration in a piezoelectric ceramic rod. A mini-ultrasonic motor prototype with this concept was designed. Both finite element method (FEM) analysis and experimental results demonstrate the concept.
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