Design and Property of a Square Cylinder Type Piezoelectric Ultrasonic Micromotor

Wu Junfei,Chu Xiangcheng,Ji Ye,Zhong Liang,Li Longtu

DOI: https://doi.org/10.3321/j.issn:1002-185X.2009.z2.066

2009-01-01

Rare Metal Materials and Engineering

Abstract:A novel rocking head type piezoelectric ultrasonic motor is designed. A square cylinder of bronze with a hole is used as the stator. 4 piezoelectric plates of PZT- 4 polarized in the thickness direction are bonded to the sides of the bar. The outer size of the motor is less than 6 mmx6 mmx10 mm. Finite element (FEA) of the stator has been made. It is found that the resonant frequency of first bending mode is 125.5 kHz. The working process of the motor is simulated by harmonic analysis, by which the vibration amplitude is calculated. Thus the taper angle of contact surface can be obtained. The Doppler Laser Vibrometer (Polytec 300-F) was used to measure the vibration characteristic of the ultrasonic motor. It shows that the resonant frequency of first bending mode is about 129.6 kHz, which coincides with the FEM result very well. Furthermore, the relationship between the output of piezoelectric motor and different dimensions of the structure are discussed, such as the thickness of piezoelectric ceramic, the diameter of hole in the quadrate bar. That can be useful to design and optimize the piezoelectric ultrasonic micromotor.