Local Vibrational Modes in Gamma-irradiated GaN Grown by Metal-Organic Chemical Vapor Deposition

WH Sun,LS Wang,SJ Chua,KM Chen,GG Qin
DOI: https://doi.org/10.1016/s1369-8001(02)00017-3
IF: 4.1
2001-01-01
Materials Science in Semiconductor Processing
Abstract:We have studied the effects of gamma-ray irradiation on Fourier transform infrared grazing incidence reflection–absorption (FTIR-GIRA) spectra of the GaN films grown on α-Al2O3 (0001) substrates using the atmospheric pressure metal-organic chemical vapor deposition process. After gamma-ray irradiation, the intensities of FTIR-GIRA spectra are enhanced and a series of new absorption features appeared. Among them, those at 3440, 3355, 3088, 2819, 2712, 2100, 1426 and 894cm−1 are discussed and identified. The reason why gamma-ray irradiation can enhance the intensities of and cause new features in FTIR-GIRA spectra of GaN films is discussed.
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