Abstract:Precise control of the crystal phase of TiO2 by sputtering at room temperature is particularly important for practical applications. In this paper, nanocrystalline TiO2 films were deposited on glass and silicon substrates using DC reactive magnetron sputtering without external heating. The phase composition and preferred orientation of the TiO2 films could be controlled by adjusting the negative bias voltages. It was found that TiO2 films deposited at free negative bias voltage or ground exhibited an anatase single phase with a strong (101) preferred orientation, while the preferred orientation transformed into (211) when the negative bias voltage reached −50V. A further increase in the negative bias voltage induced the formation of an additional rutile phase, thus generating a mixed phase of anatase and rutile. A pure rutile phase was obtained at high negative bias voltage (≥−100V). The rutile phase with (101) preferred orientation could also be obtained by increasing the bias voltages above −125V. In addition, the TiO2 films of different phases performed different photocatalytic activities. The anatase TiO2 films showed higher photocatalytic activity than rutile phase films. Particularly, anatase TiO2 films with (211) preferred orientation showed a significant photocatalytic degradation of organic dye (Rhodamine B), the degradation of which reached over 90% after an irradiation time of 2h.

Preparation of Li~+,Sb~(3+)-Codoped TiO_2 Films by the Electric Field Heating-Treatment Process

Preparation of SiO<sub>2</sub>-TiO<sub>2</sub> Films of High Photo-Catalytic Activity in the Electric Field Heating-Treatment

Study on the Phase Transformation Behavior of TiO2 Thin Films in an Electric Field

Crystallization Behavior of Anatase Films in Applied Electric Field Heating Process

Preparation and characterization of heat-assisted PbS/TiO 2 thin films

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Low-Temperature Preparation of Ag-TiO2 Composite Films and Their Properties

The Characterization and Preparation of Nano-Scale Fe Doping Tio2 by Sol-Gel Method (I) - the Crystallization and Thermal Decomposition Process of Fe Doping Tio2 Xerogel Powders Using Thermal Tg-Ir Spectrometry

The Characterization And Preparation Of Nano-Scale Fe Doping Tio2 By Sol-Gel Method - (Ii) - The Crystal Character And Grain Growth Of Fe Doping Tio2 Xerogel Powders

Phase transformation behavior of ZrO2-TiO2 thin films in electric field

Preparation of Li+-Doped Tio2 Films by Sol-Gel Process

Effects of Heat-Treatment Temperature on Preparation of the Sol-Gel-Derived Ag/TiO2 Films

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The Effects of Substrate on the Properties of Sol-Gel Derived TiO2 Films

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TiO2 films prepared by DC reactive magnetron sputtering at room temperature: Phase control and photocatalytic properties

Preparation and Crystallization Behavior of SiO2-TiO2 Photo-Catalytic Films

Preparation of Mg2+-doped TiO(2)Thin film and its photocatalytic activity

Crystallization Kinetics of Li+-Doped TiO2 Films Prepared by Sol-Gel Dip Coating

Effect of an in-situ applied electric field on growth of Bi4Ti3O12 films by sol–gel

The Preparation and Chemical Structure of Tio2 Film Photocatalyst Supported on Stainless Steel Using the Sol-Gel Method