Abstract:Titanium dioxide (TiO2) in the form of thin films has attracted enormous attention for photocatalysis. It combines the fundamental properties of TiO2 as a large bandgap semiconductor with the advantage of thin films, making it competitive with TiO2 powders for recycling and maintenance in photocatalytic applications. There are many aspects affecting the photocatalytic performance of thin film structures, such as the nanocrystalline size, surface morphology, and phase composition. However, the quantification of each influencing aspect needs to be better studied and correlated. Here, we prepared a series of TiO2 thin films using a sol-gel process and spin-coated on p-type, (100)-oriented silicon substrates with a native oxide layer. The as-deposited TiO2 thin films were then annealed at different temperatures from 400 °C to 800 °C for 3 h in an ambient atmosphere. This sample synthesis provided systemic parameter variation regarding the aspects mentioned above. To characterize thin films, several techniques were used. Spectroscopic ellipsometry (SE) was employed for the investigation of the film thickness and the optical properties. The results revealed that an increasing annealing temperature reduced the film thickness with an increase in the refractive index. Atomic force microscopy (AFM) was utilized to examine the surface morphology, revealing an increased surface roughness and grain sizes. X-ray diffractometry (XRD) and UV-Raman spectroscopy were used to study the phase composition and crystallite size. The annealing process initially led to the formation of pure anatase, followed by a transformation from anatase to rutile as the annealing temperature increased. An overall enhancement in crystallinity was also observed. The photocatalytic properties of the thin films were tested using the photocatalytic decomposition of acetone gas in a home-built solid (photocatalyst)-gas (reactant) reactor. The composition of the gas mixture in the reaction chamber was monitored using in situ Fourier transform infrared spectroscopy. Finally, all of the structural and spectroscopic characteristics of the TiO2 thin films were quantified and correlated with their photocatalytic properties using a correlation matrix. This provided a good overview of which film properties affect the photocatalytic efficiency the most.

Study on the Phase Transformation Behavior of TiO2 Thin Films in an Electric Field

Phase transformation behavior of ZrO2-TiO2 thin films in electric field

Crystallization Behavior of Anatase Films in Applied Electric Field Heating Process

Preparation of Li~+,Sb~(3+)-Codoped TiO_2 Films by the Electric Field Heating-Treatment Process

Preparation of SiO<sub>2</sub>-TiO<sub>2</sub> Films of High Photo-Catalytic Activity in the Electric Field Heating-Treatment

Electrochemical Studies On The Hydrophilic Mechanism Of Tio2 Thin Films Under Uv Irradiation

TiO2 films prepared by DC reactive magnetron sputtering at room temperature: Phase control and photocatalytic properties

Crystallization Behaviors of TiO2 Films Derived from Thermal Oxidation of Evaporated and Sputtered Titanium Films

Effect of in situ applied electric field on the growth of La2Ti2O7 thin films by chemical solution deposition

Study on Structural, Optical and Hydrophilic Properties of FTO/TiO2 Tandem Thin Film Prepared by Aerosol-Assisted Chemical Vapor Deposition Method

Electric Field-assisted Photocatalytic Reduction of Carbon Dioxide over Titanium Dioxide: Influence of the Type and Strength of Electric Field

Effect of electric-field-assisted thermal treatment on the strain and ferroelectric properties of (100)-oriented ferroelectric Pb(Zr0.52Ti0.48)O3 thin films

Study on Phase Transition of Nano-Size TiO2 During the Heat Treatment

Photocatalytic Performance of Sol-Gel Prepared TiO2 Thin Films Annealed at Various Temperatures

Effect of an in-situ applied electric field on growth of Bi4Ti3O12 films by sol–gel

High-temperature solid-state rutile-to-anatase phase transformation in TiO2

Study of the phase transformation of TiO2 with in-situ XRD in different gas]

Electric-Field-Controlled Phase Transformation in WO3 Thin Films Through Hydrogen Evolution

Influence of preparation technique on the microscopic structure and surface morphology of nanometer TiO2 thin films

Photoelectrochemical Characteristics of Nano-Titanium Dioxide Thin Films Prepared by RF Magnetron Sputtering

The Preparation of Transient Nanocrystalline TiO2 Film and the Study on It's UV Photoelectric Property