Realization of One-Chip-two-wavelength Light Sources

JS Song,MW Cho,DC Oh,H Makino,T Hanada,BP Zhang,Y Segawa,HS Song,IS Cho,JH Chang,T Yao
DOI: https://doi.org/10.1016/j.mssp.2003.05.001
IF: 4.1
2003-01-01
Materials Science in Semiconductor Processing
Abstract:We proposed a vertically integrated one-chip-two-wavelength light source which consists of a separate confinement single-quantum-well (SCH-SQW) ZnCdSe/ZnSe/ZnMgBeSe heterostructure for blue-green light emitters grown on SCH-MQW InGaP/InGaAlP for red light-emitting devices.We investigated, firstly, the effect of a thin low-temperature-grown ZnSe buffer layers (LT-ZnSe) in improving ZnSe crystallinity by inserting it between the high-temperature-grown ZnSe epilayer and the GaAs substrate, secondly, the growth optimization of LT-ZnSe on tilted GaAs (0 0 1) substrate, and lastly, the molecular beam epitaxy growth and characterization of ZnCdSe/ZnSe/ZnMgBeSe quantum well structures on metal organic chemical vapor deposition (MOCVD) grown III-V red light emitters.Optically pumped lasing is achieved from II-VI and III-V laser structures on one chip at room temperature. The present results clearly show the feasibility of epitaxial integration of II-VI and III-V laser structures. (C) 2003 Elsevier Ltd. All rights reserved.
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