Lateral Oxidation in Vertical Cavity Surface Emitting Lasers

Wenli Liu,Yongqin Hao,Yuxia Wang,Xiaoguang Jiang,Yuan Feng,Haijun Li,Jingchang Zhong
DOI: https://doi.org/10.3969/j.issn.1674-4926.2006.08.003
2006-01-01
Chinese Journal of Semiconductors
Abstract:Lateral oxidation in vertical cavity surface emitting lasers (VCSELs) is described,and its characteristics are investigated.A linear growth law is found for stripe mesas.However,oxide growth (above 435℃) follows a nonlinear law for the two geometry mesa structures which we employ in VCSEL.Theoretical analysis indicates that mesa structure geometry influences oxide growth rate at higher temperatures.
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