Abstract:Nitrogen-doped Czochralski (NCZ) silicon has been a base material for integrated circuits. The interaction between nitrogen (N) and interstitial oxygen (Oi) atoms in the low temperature regime (300–650 °C), which leads to N–O complexes in the form of NOx (x = 1, 2, or 3), forms a series of shallow thermal donors (denoted as N–O STDs). Such N–O STDs are detrimental to the stability of electrical resistivity of NCZ silicon. In this work, we have experimentally investigated the elimination of N–O STDs in NCZ silicon by means of conventional furnace anneal (CFA) and rapid thermal anneal at elevated temperatures ranging from 900 to 1250 °C, aiming to explore the underlying mechanism. It is found that most of the N–O STDs formed in NCZ silicon can be eliminated by a very short period of anneal at the aforementioned temperatures, providing solid evidence for the viewpoint that the elimination of N–O STDs is ascribed to the decomposition of NOx complexes. Somewhat unexpectedly, the residual N–O STDs are much more after the 1250 °C/2 h CFA than after the 900 °C/2 h or 1000 °C/2 h counterpart, which is found to be due to the fact that more nitrogen pairs [(N2)s] are remaining after the 1250 °C/2 h CFA. It is proposed that most of the (N2) atoms are involved in the growth of grown-in oxide precipitates during the 900 or 1000 °C/2 h CFA. The first-principles calculations and molecular dynamics simulation indicate that the elimination of N–O STDs is essentially ascribed to the destruction of “NO ring” that is the core of NOx complexes. Furthermore, based on the experimental and theoretical results, we have made a thorough thermodynamic analysis to account for the details of elimination of N–O STDs as revealed in this work. It is believed that our experimental and theoretical studies have gained more insight into the N–O STDs in NCZ silicon.

Electrical Activity of Nitrogen-Oxygen Complexes in Silicon

Nitrogen-Oxygen Complexes in Silicon

Effect of Nitrogen–oxygen Complex on Electrical Properties of Czochralski Silicon

Evolution of Nitrogen Pairs and Nitrogen‐oxygen Complexes in Nitrogen‐doped Czochralski Silicon

On the Mechanism Underlying the Elimination of Nitrogen-Oxygen Shallow Thermal Donors in Nitrogen-Doped Czochralski Silicon at Elevated Temperatures

Formation of Nitrogen-Oxygen Donors in N-doped Czochralski-silicon Crystal

Role of Nitrogen Related Complexes in the Formation of Defects in Silicon

Study on the infrared absorption of nitrogen-oxygen complex in silicon

Shallower Thermal Donor and Nitrogen-Oxygen Complex in Nitrogen Doped Czochralski Silicon

Stress Dependent Structure of Annealed Nitrogen-Doped Cz-Si

Oxygen Precipitation in Nitrogen Doped Czochralski Silicon Wafers. I. Formation Mechanisms of Near-Surface and Bulk Defects

Electrical Characteristic of Oxygen-Related Donors in p-Type Czochralski Silicon

Kinetics of Nitrogen Indiffusion in Czochralski Silicon Annealed in Nitrogen Ambient

Influence of Dislocations on Nitrogen–Oxygen Complex in Silicon

Enhanced Oxygen Precipitation In Neutron-Irradiated Nitrogen-Doped Czochralski Silicon Crystal

Transmission Electron Microscopic Observation of Oxygen Precipitates in Nitrogen-Doped Silicon

Oxygen Precipitation of Nitrogen-Doped Czochralski Silicon Subjected to Multi-Step Thermal Process

Infrared Absorption of Nitrogen–oxygen Complex in Silicon

Nitrogen Effect on Hydrogen Penetration into Cz Si During Wet Chemical Etching

Effect of High Temperature–pressure on Nitrogen-Doped Czochralski Silicon

Formation of the thermal donors in the hydrogen-implanted nitrogen-doped silicon crystal