Diagnosis of Active Species in Reactive Acetylene Plasma by Laser-Ionization Molecular-Beam Time-of-Flight Mass Spectrometry

Chunlei Feng,Liping Wang,Yan Wang,Liang Gao,Hongbin Ding

DOI: https://doi.org/10.1007/s11090-011-9295-2

2011-01-01

Plasma Chemistry and Plasma Processing

Abstract:This work reports a new laser molecular beam time-of-flight mass spectrometry (LMB-TOFMS) instrument built at Plasma Spectroscopy Lab in Dalian University of Technology (DUT). The preliminary investigation of the intermediate species distribution of acetylene plasma in an atmospheric-pressure fast-flow nanosecond-pulsed dc-discharge has been carried out. The C x H 2 species (x = 4,6,8), believed to be the dominant source of negative ions in C 2 H 2 plasma, have been detected with relatively intense peak signals and some complex radical species like C 7 H 7 , C 9 H 5 , C 10 H 5 are also observed. The addition of Ar gas significantly influenced the detection of the intermediate species. This is might be due to the metastable Ar * with energies of 11.5 and 11.7 eV and a long lifetime. The potentialities of LMB-TOFMS for hydrocarbon plasmas diagnosis have been discussed.