Abstract:The purpose of this study is to design a diagnostic system for reactive plasma environment by combining molecular-beam time-of-flight (TOF) mass spectroscopy with laser spectroscopy technique. The combination of TOF mass spectrometers and pulsed lasers is favorable in the diagnosis of intermediate species distribution since they allow the simultaneous but separate recording of the spectra of different species. In the plasma system, the intermediate species in electronic ground state or low lying excited state is pumped to higher energy level with resonant laser excitation, and then, the ionization with a second laser system is possible which can readily be detected by the TOF analyzer. The ionization itself is only used as a detection mechanism for the observation of the excitation of these states. In this manner, the population distribution of intermediate species can be determined with state-selective and mass-selective feature. Also, in this article, a flexible data acquisition and automatic control system based on LABVIEW was designed to integrate all the stand-alone measurement instruments including a TOF spectrometer, a laser system, a high performance oscilloscope, and a digital delay generator into a single personal computer-based control unit. Moreover, a virtual Boxcar integrator with hundreds of channels has been developed to enhance the signal while filtering out the random noises. Finally, the many potentials of this technique in the application of plasma diagnosis will be discussed.

A Linear Time-of-flight Mass Spectrometer with Relatively High Resolution for Diagnostic of High Energy Ion Beam

Development of Time-of-Flight Mass Spectrometer for Detection of High Energy Ion and Its Application in Plasma Diagnosis

Development of a miniature time-of-flight mass/charge spectrometer for ion beam source analyzing

A small high-irradiance laser ionization time-of-flight mass spectrometer.

Development of Orthogonal Acceleration Time-of-Flight Mass Spectrometer for Detection of Ions with Wide Energies Distribution

Time-of-flight mass spectrometry with an electrospray ion beam

A modified time-of-flight mass spectrometer for studying ion-molecule or neutral particle-molecule interactions

Corona Discharge Ionization Source for A Planar High-Field Asymmetric Waveform Ion Mobility Spectrometer

A 1 eV - 1000 eV ion beam system designed for the calibration of low-energy ion mass spectrometers

A linear time-of-flight mass analyzer for thermal ionization cavity mass spectrometry

Electrostatic-lenses position-sensitive TOF MCP detector for beam diagnostics and new scheme for mass measurements at HIAF

Design, Fabrication and Mass-spectrometric Studies of a Micro Ion Source for High-Field Asymmetric Waveform Ion Mobility Spectrometry

A Needle-to-post Air Discharge Ion Source in Tandem with FAIMS System.

Design of a Laser Ionization Source and Its Application on Desktop Time-of-Flight Mass Spectrometer

Microsecond Pulsed Glow Discharge Time‐of‐flight Mass Spectrometer

Laser Mass-Spectrometry for Online Diagnosis of Reactive Plasmas with Many Species.

A novel time-of-flight mass spectrometer using radial extraction from a linear quadrupole trap for atomic, molecular, and chemical physics

Development of a Low Power Miniature Linear Ion Trap Mass Spectrometer with Extended Mass Range

Energy-Resolving Time-of-Flight Mass Spectrometry for Bulk Plasma Analysis

Development and Evaluation of a Glow Discharge Microwave-Induced-Plasma Tandem Source for Time-of-Flight Mass Spectrometry

Single Photon Ionization and Chemical Ionization Combined Ion Source Based on a Vacuum Ultraviolet Lamp for Orthogonal Acceleration Time-of-flight Mass Spectrometry.