Development of a miniature time-of-flight mass/charge spectrometer for ion beam source analyzing

zhengxu huang,guobin tan,zhen zhou,lei chen,liang cheng,dazhi jin,xiaohua tan,chunguang xie,lei li,junguo dong,zhong fu,ping cheng,wei gao
DOI: https://doi.org/10.1016/j.ijms.2014.12.003
IF: 1.934
2015-01-01
International Journal of Mass Spectrometry
Abstract:•A home-made miniature TOF MS for vacuum arc discharge ion source was developed.•The miniature TOF MS is 413mm×250mm×414mm and total weight is about 25kg.•The resolution is 600 and the detection range of ion kinetic energy is up to 102.•The copper cathodic vacuum arc plasma was test, with Cu+, Cu2+ and Cu3+ dominating.
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