Design of a Molecular-Beam Time-of-flight Mass Spectrometer for Diagnosing Radicals

LIU Jia-hong,YAO Zhi,XIAO Qing-mei,WANG Li-ping,DING Hong-bin
DOI: https://doi.org/10.16411/j.cnki.issn1006-7736.2010.02.001
2010-01-01
Abstract:A molecular-beam time-of-flight(MB-TOF) mass spectrometer combining laser ionization was developed to diagnose free radical species in plasmas.MB-TOF was used to study on pulsed C6H6/Ar discharge plasma,and laser ionized neutral radicals such as C4H2、C4H9、C5H5 and C6H3 were measured.Tests indicate that the developed MB-TOF technique has the capability to diagnose the neutral radicals in complicated plasma conditions.
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