The fabrication of a micro-spiral structure using EDM deposition in the air

Guanxin Chi,Zhenlong Wang,K Xiao,Jingzhi Cui,Baidong Jin
DOI: https://doi.org/10.1088/0960-1317/18/3/035027
2008-01-01
Journal of Micromechanics and Microengineering
Abstract:A novel micromachining method to deposit a micro-3D spiral structure in air using electrical discharge machining (EDM) with a brass electrode was presented. During the deposition process, a 3D spiral structure is obtained only by the feed of the z-axis in the vertical direction. Furthermore, the obtained structure can be formed and repeated stably even in the upside-down direction under a gravity environment. It is seen that the material components of a micro-spiral structure are almost the same as those of an electrode by the energy spectrum analysis of a micro-spiral structure. According to scanning electron microscope photographs, the micro-spiral appears to feature a layered material organism structure and has compact bonding with the body material. In order to understand the forming mechanism of this kind of micro-spiral structure, simulation analysis is conducted. The track of the deposition particles can be obtained by simulation, which determines the shape of the deposited structure. According to the simulation results, the track of the deposition particles is consistent with that of EDM experiments. It is further found that the distribution of the electromagnetic field in a discharge channel has an important influence on the deposited structure and the track of the deposition particles.
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