Thermally stable nanocrystallised mesoporous zirconia thin films

Kaixue Wang,Michael A. Morris,Justin D. Holmes,Jihong Yu,Ruren Xu
DOI: https://doi.org/10.1016/j.micromeso.2008.06.019
IF: 5.876
2009-01-01
Microporous and Mesoporous Materials
Abstract:A supercritical fluid process method has been developed for fabricating mesoporous zirconia thin films with enhanced thermal stability up to a temperature of 850°C. Both the supercritical CO2 and the precursor tetramethoxysilane play an important role in enhancing the thermal stability of these films. Powder X-ray diffraction, Atomic force microscope, spectroscopic ellipsometry and transmission electron microscope analyses show that the thin films fabricated by the supercritical fluid process method have a highly ordered mesoporous structure, a nanocrystalline inorganic framework and a high optical transparency. These zirconia thin films have potential applications as electrodes in solid oxide fuel cells where high thermal stability is essential.
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