Plan Design of Nanometer Large Stroke Multi-DOF Feeding Table

Liu Xiangyang,YU Dingwen,FENG Pingfa,SUN Guozi
DOI: https://doi.org/10.3969/j.issn.1005-2402.2005.03.040
2005-01-01
Abstract:DOF (Dimension of freedom) feeding table is the key part when 3-DOF structure parts are machined. The principles and characteristics of high-precision feeding tables in domestic and abroad are concluded and analyzed in this paper. Up to now, the products of nanometer absolute accuracy and hundreds millimeter travel are absent. Several schemes of multi-DOF feeding table meeting the above described requirements are proposed and their advantages and disadvantages are analyzed.
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