Abstract:This paper presents a large-stroke piezo-actuated planar motor for nano-positioning applications. The planar motor uses an air bearing with vacuum preload to reduce friction in motion directions. Four piezo legs located at each corner of the mover can perform three operation modes to drive the planar motor: the skiing mode, the stepping mode, and the tilting mode. The skiing mode is a high-speed actuation mode. The stepping mode provides high-resolution trajectory tracking capability. The tilting mode allows for fine adjustment of the stage in its final position with the highest resolution. These three operation modes have different positioning advantages and can be combined to achieve both a high positioning speed and a high positioning resolution. The piezo-actuated planar motor has large stroke that is only limited by the base size and large rotation range up to 360°. An active planar encoder based on flat panel display has been developed as a feedback system to evaluate the motion performance of the planar motor including motion resolution, maximum motion speed and trajectory tracking accuracy.

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