Control Technology of Ultra-precision Planar Motor

CAO Wei,MU Haihua,ZHOU Yunfei
DOI: https://doi.org/10.3969/j.issn.1001-3881.2007.05.022
2007-01-01
Abstract:On the base of architecture and principle of the planer motor,the control technology was introduced.The driving force of the planar motor was decoupled.The effect of the heterogeneity coupling of the magnetic field upon the non-linearity of the driving force was discussed,and the compensation methods were given.The diagnosis and test method of vertical stator gap symmetry was discussed.Results show that the methods proposed improve positioning precision of planar motor.
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