Abstract:Micro and Nano-technologies need precision machines that can produce motion accuracy down to micro/nano-meter range. At the same time, these machines have to operate at high speeds to yield high productivity. Such an increasingly tight control performance requirement puts a significant challenge to control community and forces control engineers to look beyond traditional linear control theory for more advanced nonlinear controllers. This research is to present an advanced nonlinear adaptive robust control approach to achieve micro/nanometer level positioning accuracy for micro/nano-manipulation type applications. In addition, the proposed control strategy is implemented on a commercial linear motor drive system with a position measurement resolution of 20 nanometers by an external laser interferometer. Experimental results for both long-range high-speed/high-acceleration motions and short-range slow motions are presented to demonstrate the precision motion that can be achieved by the proposed method and various practical issues that remain to be solved. It is found that for motions with a maximum speed of 2 m/sec and maximum acceleration of 45 m/sec2, the steady state position tracking error is within the linear encoder resolution of 0.5 μm when the system comes to a stop and within 5 μm during the 2 m/sec constant speed period. Furthermore, the maximal position tracking during the entire motion is mostly within 20μm. For slow motions with a maximal speed of only 0.0002m/sec, the steady state position tracking error with the external laser interferometer position measurement is mostly within 0.1 μm when the system comes to a stop and within 0.2 μm during the constant low speed period, and the maximal position tracking during the entire motion is within 2μm.

Key technologies of high speed and high precision motion system for microelectronic manufacture

Modeling And Control Method Study Of Magnetostrictive Micropositioner And Its Application

Robust Control of High Speed High Precision Linear Motion System

Program Realization of High-speed and High-precision Surface Mounting System Based on Vision

Linear Motor Feed Drive System and Its Key Technology

Non-cylinder Holes Precision Machining by Giant Magnetostrictive Components with Sliding Mode Control

Several key technologies of hydraulic system with high flow and high performance

Research on High Precision Drive System of Permanent Magnet Synchronous Motor

Realization of Two-Axis Macro-Micro Dual-Driven System

A Dual-Stage Control System for High-Speed, Ultra-Precise Linear Motion

Design and Error Compensation Performance of a Precision Micro-Drive Rotary System

A Review of Key Technologies for High-Speed Motorized Spindles of CNC Machine Tools

A review of dynamics design methods for high-speed and high-precision CNC machine tool feed systems

STUDY ON THE HIGH PERFORMANCE LINEAR SERVO SYSTEM FOR MIDDLE-CONVEX AND VARYING ELLIPSE PISTON MACHINING

Advances in Large-stroke and High-resolution Drive System

Control Technology of Ultra-precision Planar Motor

Precision Motion Control of Linear Motor Drive Systems for Micro/Nano-Positioning

Study on Application of Motion Control Technology

Research of the High Dynamic Performance Moving Parts on Ultra-precision Stage

Study on the Time Domain Precision Evolution Mechanism of CNC Machine Tool Feed Systems Based on Acceleration and Deceleration Capability Indicator

A 2-D Precision Positioning Table System Driven by Linear Ultrasonic Motors