Design and Control of Dual-Stage Feed Drive System in Ultra-Precision Machine Tools

李国,王波,董申,王石磊

DOI: https://doi.org/10.3321/j.issn:1004-924x.2009.06.039

2009-01-01

Optics and Precision Engineering

Abstract:The design and control of a Dual-stage Feed Drive (DSFD) system on a ultra-precision machine is presented. The DSFD system combining coarse (large stroke) and fine (fine resolution) drive stages in series is designed to provide the desired performance,in which a step motor is used for the coarse motion to obtain the large stroke and fast response speed, and a piezoelectric micro-actuator for the fine motion to achieve the high resolution and accuracy.A control system for the mechanism is developed based on a multiple model-based switching controller,and a movement distribution module is designed for the motion coordinations of coarse and fine movements. Finally,a experiment is undertaken by controlling both stages separately for the actual positionon the DSFD system and a measurement is carried out by a laser interferometer. The experimental results show that the step motor has a working stroke of 90 mm with the displacement resolution of 0.3 μm and the piezoelectric micro-actuator has a working stroke of 40 μm with the positioning accuracy of 0.9 μm. The theoretical and experimental results show the validity of the control algorithm.