Thermal Conductivity of Thin Films: Measurements and Understanding

DG CAHILL,HE FISCHER,T KLITSNER,ET SWARTZ,RO POHL
DOI: https://doi.org/10.1116/1.576265
1989-01-01
Abstract:Several techniques are reviewed with which thermal conductivity and phonon scattering can be measured in films of thicknesses ranging from angstroms to millimeters. Recent experimental results are compared critically with previous measurements. It is shown that phonons are very sensitive probes of the structural perfection of the films.
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