The behavior of yttrium implants in H13 steel under high temperature oxidation

Ji Chengzhou,Wang Anming,Liao Huailin
DOI: https://doi.org/10.1016/S0257-8972(00)00627-7
2000-01-01
Abstract:The penetration depth of yttrium ions extracted at 30 kV from a metal vapor vacuum are (MEVVA) source reaches approximately 50 nm in H13 steel. For a pre-set dose of 3 X 10(17) cm(-2), the retained dose decreases (1.04 X 10(17)-6.2 X 10(16) cm(-2)) with increasing beam flux (25-76 mu A cm(-2)). During high temperature (600-800 degrees C) oxidation, yttrium implants have no change in quantity, but migrate inwards and redistribute themselves. As the dose is increased (up to 1 X 10(18) cm(-2)) in-going yttrium is redistributed almost uniformly within the oxidation scale; when the beam flux is increased the peak of yttrium profile shifts to a much deeper position (245 nm for 76 mu A cm(-2)). Yttrium redistribution is not sensitive to oxidation time. A tentative explanation is presented. (C) 2000 Elsevier Science S.A. All rights reserved.
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