Development of Flexible Nickel Thermal Sensor Array

Xu Yanguang,Ma Binghe,Deng Jinjun
DOI: https://doi.org/10.3969/j.issn.1003-353x.2009.07.20
2009-01-01
Abstract:With MEMS fabrication technology,flexible Ni thermal sensor array was successfully fabricated.Sensing material selection,Ni-film resistor design and micro-fabrication technology of the flexible sensor array were researched.According to the methods of oil bath and current step response,static and dynamic parameters were measured.The experimental results show that thermal sensors in the range from 5 to 80 ℃ have a high TCR and fast thermal response speed.The flexible sensor array can be a new means for low-invasive distribution measurement of temperature,velocity,shear stress,especially on curved surfaces.
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