Production method of flexible array of temperature sensor

Tao Mei,Jianhua Shan,Zhengyong Zhang,Lei Sun,Lin Ni,Shirong Chen,Dongfeng Zhang,Yongchun Tao,Deyi Kong,Qinghu Meng
2008-01-01
Abstract:The invention discloses a structure of a flexible temperature sensor array and the making method thereof. The flexible temperature sensor array comprises thermosensitive resistors and leads connected with the thermosensitive resistors, characterized in that one side of the thermosensitive resistor is connected with the boss of a flexible substrate and the other side and the connected lead are coated with an insulating protective layer, the flexible substrate is provided with an array of above 16 thermal thermosensitive resistor in the above structure to compose a sensor array; and the making method comprises photoetching and plasma etching as well as lift-off method; the thermosensitive resistor is a metal Pt or Ni film resistor, and the lead is of metallic film; and the flexible substrate and the boss and the insulating protective layer are all of flexible material and able to bend, applied to the detection of temperature and temperature distribution for any curves.
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