Abstract:Titanium dioxide (TiO2) in the form of thin films has attracted enormous attention for photocatalysis. It combines the fundamental properties of TiO2 as a large bandgap semiconductor with the advantage of thin films, making it competitive with TiO2 powders for recycling and maintenance in photocatalytic applications. There are many aspects affecting the photocatalytic performance of thin film structures, such as the nanocrystalline size, surface morphology, and phase composition. However, the quantification of each influencing aspect needs to be better studied and correlated. Here, we prepared a series of TiO2 thin films using a sol-gel process and spin-coated on p-type, (100)-oriented silicon substrates with a native oxide layer. The as-deposited TiO2 thin films were then annealed at different temperatures from 400 °C to 800 °C for 3 h in an ambient atmosphere. This sample synthesis provided systemic parameter variation regarding the aspects mentioned above. To characterize thin films, several techniques were used. Spectroscopic ellipsometry (SE) was employed for the investigation of the film thickness and the optical properties. The results revealed that an increasing annealing temperature reduced the film thickness with an increase in the refractive index. Atomic force microscopy (AFM) was utilized to examine the surface morphology, revealing an increased surface roughness and grain sizes. X-ray diffractometry (XRD) and UV-Raman spectroscopy were used to study the phase composition and crystallite size. The annealing process initially led to the formation of pure anatase, followed by a transformation from anatase to rutile as the annealing temperature increased. An overall enhancement in crystallinity was also observed. The photocatalytic properties of the thin films were tested using the photocatalytic decomposition of acetone gas in a home-built solid (photocatalyst)-gas (reactant) reactor. The composition of the gas mixture in the reaction chamber was monitored using in situ Fourier transform infrared spectroscopy. Finally, all of the structural and spectroscopic characteristics of the TiO2 thin films were quantified and correlated with their photocatalytic properties using a correlation matrix. This provided a good overview of which film properties affect the photocatalytic efficiency the most.

Effect of Substrate Temperature on Structural Properties and Photocatalytic Activity of TiO2 Thin Films

Effects of substrate temperature on the microstructure and photocatalytic reactivity of TiO2 films

Controllable Hydrothermal Synthesis, Optical and Photocatalytic Properties of TiO2 Nanostructures

Effect of the Substrate Temperature on the Crystallization of TiO2 Films Prepared by DC Reactive Magnetron Sputtering

Effect of Calcination Temperature on Crystal Structure and Photocatalytic Prop- Erty of TiO2/Diatomite Nanoparticles

Crystallization Behaviors of TiO2 Films Derived from Thermal Oxidation of Evaporated and Sputtered Titanium Films

Photocatalytic Activity of TiO2 Films with Mixed Anatase and Rutile Structures Prepared by Pulsed Laser Deposition

Radio Frequency Magnetron Sputtering Growth of Titanium Dioxide Thin Films: Effects of Substrate Temperature on Microstructural and Optical Properties

Oxidation Conditions of Ti and Photocatalysis of TiO2 Ceramic Films

Influence of Substrate Temperature on Surface Morphology and Properties of Titanium Oxide Thin Films

Effect of Substrate Temperature on the Microstructure of TiO2 Thin Films and UV Photoelectric Properties

Influences of Thermal Treatment on Photocatalytic Property of Porous TiO_2 Films

The Influence of Substrate Temperature on the Electrical and Optical Properties of Titanium Oxide Thin Films Prepared by D.c. Reactive Magnetron Sputtering

Effect of Calcination Temperature on the Structure and Photocatalytic Performance of TS/TiO2

Photocatalytic Performance of Sol-Gel Prepared TiO2 Thin Films Annealed at Various Temperatures

Influence of Substrate on Structural, Morphological and Optical Properties of TiO2 Thin Films Deposited by Reaction Magnetron Sputtering

Effects of Annealing Temperature on the Structure and Electrochromic Properties of TiO2 Films

Characterization of sprayed TiO2 on ITO substrates for solar cell applications

Structure and photoluminescence of the TiO 2 films grown by atomic layer deposition using tetrakis-dimethylamino titanium and ozone

Photocatalytic Properties of Titania Thin Films by Radio Frequency Magnetron Sputtering from Ceramic Target

Influence of Hydrothermal Temperature on Structural and Photocatalytic Activity of Titanium Dioxide