Abstract:Titanium dioxide (TiO2) in the form of thin films has attracted enormous attention for photocatalysis. It combines the fundamental properties of TiO2 as a large bandgap semiconductor with the advantage of thin films, making it competitive with TiO2 powders for recycling and maintenance in photocatalytic applications. There are many aspects affecting the photocatalytic performance of thin film structures, such as the nanocrystalline size, surface morphology, and phase composition. However, the quantification of each influencing aspect needs to be better studied and correlated. Here, we prepared a series of TiO2 thin films using a sol-gel process and spin-coated on p-type, (100)-oriented silicon substrates with a native oxide layer. The as-deposited TiO2 thin films were then annealed at different temperatures from 400 °C to 800 °C for 3 h in an ambient atmosphere. This sample synthesis provided systemic parameter variation regarding the aspects mentioned above. To characterize thin films, several techniques were used. Spectroscopic ellipsometry (SE) was employed for the investigation of the film thickness and the optical properties. The results revealed that an increasing annealing temperature reduced the film thickness with an increase in the refractive index. Atomic force microscopy (AFM) was utilized to examine the surface morphology, revealing an increased surface roughness and grain sizes. X-ray diffractometry (XRD) and UV-Raman spectroscopy were used to study the phase composition and crystallite size. The annealing process initially led to the formation of pure anatase, followed by a transformation from anatase to rutile as the annealing temperature increased. An overall enhancement in crystallinity was also observed. The photocatalytic properties of the thin films were tested using the photocatalytic decomposition of acetone gas in a home-built solid (photocatalyst)-gas (reactant) reactor. The composition of the gas mixture in the reaction chamber was monitored using in situ Fourier transform infrared spectroscopy. Finally, all of the structural and spectroscopic characteristics of the TiO2 thin films were quantified and correlated with their photocatalytic properties using a correlation matrix. This provided a good overview of which film properties affect the photocatalytic efficiency the most.

Effects of Annealing Temperature on the Structure and Electrochromic Properties of TiO2 Films

Electrochromism of titanium oxide thin films

Influence of Annealing Temperature on Microstructure and Phase Transformations of Oxide System Bi2O3/TiO2 Formed in Aqueous Solutions

Annealing Temperature Dependent Microstructure and Optical Properties of HfxTi1-xO2 Thin Films

Influence of annealing on microstructure and electrochromic properties of WO3 thin film

Effect of Annealing Temperature on Wettability of TiO2 Nanotube Array Films.

Effect of annealing temperature on the physical of nanostructured TiO2 films prepared by sol-gel method

Effect of annealing temperature of titanium dioxide thin films on structural and electrical properties

Influence of Annealing Temperature on the Properties of Titanium Oxide Thin Film

Effect of Annealing Temperature on F-doped TiO2 Spin Coated Thin Films

Preparation and Investigation of Sol–Gel TiO2-NiO Films: Structural, Optical and Electrochromic Properties

The Effects Of Annealing On Characteristics Of The Ito Films

Long life all-solid-state electrochromic devices by annealing

Effects of Annealing Process on Characteristics of Fully Transparent Zinc Tin Oxide Thin-Film Transistor

Effect of Annealing Temperature on Morphology and Electrochromic Performance of Electrodeposited WO3 Thin Films

Thermal Annealing Effects of V2O5 Thin Film as an Ionic Storage Layer for Electrochromic Application

Influence of Thermal Annealing on Electrical and Optical Properties of Indium Tin Oxide Thin Films

The effect of hydro-thermal synthesis temperature on the dye sensitized TiO2 electrode

Effects of Ti-doping amount and annealing temperature on electrochromic performance of sol-gel derived WO3

Photocatalytic Performance of Sol-Gel Prepared TiO2 Thin Films Annealed at Various Temperatures

The effect of an annealing process on atomic layer deposited TiO2thin films