A Novel Design for the Miniaturization of the DMTL Phase Shifter

JIN Bo-shi,WU Qun,HE Xun-jun,TANG Kai,YANG Guo-hui,Lee Jong-Chul

DOI: https://doi.org/10.3969/j.issn.1004-1699.2006.05.153

2006-01-01

Abstract:Using the method of coating the low dielectric constant thin-layer insulation film on the signal line of the coplanar waveguide, MIM capacitor is formed between the MEMS bridge and signal line, the ratio of the capacitor of the down state and up state is increased, thus the phase shift of the unit length is raised. Comparing with the traditional design, the same quantity of the phase shift can be achieved with less MEMS bridges, and the size of the naked chip is reduced by about 60%. Besides, the accuracy control of the MEMS phase shifter is also improved a lot for the height of MEMS bridge hard to change under the down state.