Research of CIGS Thin Films on Glass Substrates by RF Magnetron Sputtering

Qian Qun,Zhang Congchun,Yang Chunsheng,Ding Guifu,Hou Jie
DOI: https://doi.org/10.3969/j.issn.1671-4776.2010.11.005
2010-01-01
Abstract:The copper indium gallium selenide(GIGS)thin film was prepared on glass substrates by RF magnetron sputtering.The influences of the substrate temperature,sputtering pressure and annealing treatment on the bonding force with the substrate,microstructure,crystallization and electric resistivity of the CIGS thin film were discussed.The energy dispersive spectrum(EDS)testing result shows that the Ga proportion of the prepared CIGS thin film satisfies the demand of the high efficiency CIGS absorption layer.The results of the canning electron microscopy(SEM)and X-ray diffraction(XRD)testing show that sputtering at 450 ℃ after heating and annealing the substrate can improve the bonding force and crystallization.Based on the testing results of four-probe method,it is testified that sputtering at low pressure and then annealing can effectively reduce the resistivity of CIGS thin films.Through transmission spectrum analysis,it is proved that the CIGS thin film has a high absorptivity to the visible light and can be used as a high efficiency absorption layer for solar cells.
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