Processing of highly oriented LiNbO3 thin films through ametal-organic precursor solution

S. Hirano,T. Yogo,W. Sakamoto,Y. Takeichi,S. Ono
DOI: https://doi.org/10.1016/S0955-2219(03)00209-7
IF: 5.7
2004-01-01
Journal of the European Ceramic Society
Abstract:A novel processing method for highly oriented pattered LiNbO3 films is developed using a chemically modified precursor molecule with UV sensitive chemical bonds. Patterned LiNbO3 films can be also synthesized via water-based precursor solution by applying a photolithographic technique. Patterned LiNbO3 films crystallized on sapphire substrates with a highly preferred orientation along the c axis, by heat treatment at temperatures around 500 °C. LiNbO3 films prepared from aqueous precursor solutions were characterized in terms of the hydroxyl content of their surface layers, determined from their crystallization and optical properties.
What problem does this paper attempt to address?