Development of All Solid State Gas Sensors

LU Ge-yu,LIU Feng-min,SUN Yan-feng,LIANG Xi-Shuang,GAO Yuan,SUN Peng,QUAN Bao-fu

DOI: https://doi.org/10.3969/j.issn.1002-8935.2013.02.001

2013-01-01

Abstract:This paper introduced the development of all solid state gas sensors including semiconductor oxide sensors,solid electrolyte sensors,catalytic combustion sensors,and some sensors based on other principle.

What problem does this paper attempt to address?

Research Development of Electrochemical-Based Solid-State CO2 Sensor

LIU Chao,WANG Yan-gang,KANG Shi-fei,ZHU Pei-yi,LI Xi

DOI: https://doi.org/10.3969/j.issn.1000-9787.2012.06.001

2012-01-01

Abstract:The development of potentiometric sensors for environmental gases monitoring has become a well-established direction in sensor technology.Reliable and cost-saving CO2 sensor bears a huge market potential because of its wide application in a vast range of industries.The types of the electrochemical-based solid-state CO2 sensor is generalized,their detection processes are analyzed,an overview on mechanisms and properties of CO2 sensors development is provided,and the possibility of the future CO2 sensor application is described.
The Research on the Gas Sensor Based on LAPS and Nanometer Porous Silicon

ZONG Xiao-lin,CAI Hua,YU Hui,WANG Ping

DOI: https://doi.org/10.3969/j.issn.1004-1699.2006.05.219

2006-01-01

Abstract:A new kind of sensor for gas test based on the method of light addressable potentiometric sensor(LAPS) and porous silicon technique is developed. Combined with the MicroElectro Mechanical System (MEMS) techniques for the LAPS fabrication and the characteristics of this kind of planar apparatus, a new way for the detection of gases released during the metabolism of cells is attainable. From some primary results, it is shown that, the sensor had relatively evident response to alcohol gas under the room temperature, along with some concentration gradient characteristics. The feasibility of the design of this kind of sensor is proved.
The Development of Gas Sensitive Polymer and Polymer Composite

CHEN You-si,LI Yang,YANG Mu-jie

DOI: https://doi.org/10.3969/j.issn.1001-7119.2005.02.023

2005-01-01

Abstract:The development of gas sensitive polymer and polymer composites is reviewed.The gas sensitive properties and sensing mechanisms of these materials are introduced.The development trend of gas sensors is briefly discussed.
The Development Of Several Normal Gas Sensors

李冬梅,黄元庆,张佳平,张鑫,辜克兢

DOI: https://doi.org/10.3969/j.issn.1006-883X.2006.01.001

2006-01-01

Abstract:With the development of the gas sensor, more and more applications are implemented, especially in testing the environment quality and the industry’s safety production, even people’s life. The gas sensors’ working principles including the new development of several normal poisonous gases and flammable gases will be introduced. A novel production technics-MEMS which is applied to fabricate the gas sensor will also be mentioned.
Study and Developing Trend of Gas Sensors

马戎,周王民,陈明

DOI: https://doi.org/10.3969/j.issn.1674-5795.2004.04.001

2004-01-01

Abstract:This paper introduces the character of the gas sensors. Based on the gas sensitive materials used in the gas sensors and the different interaction mechanisms between the gas sensitive materials and the gases,the sensors are classified. The present processing technology of the gas sensors is studied. The developing trend of the gas sensors is introduced emphatically.
Recent Development of Gas Sensing Platforms Based on 2D Atomic Crystals

Jiacheng Cao,Qian Chen,Xiaoshan Wang,Qiang Zhang,Hai-Dong Yu,Xiao Huang,Wei Huang

DOI: https://doi.org/10.34133/2021/9863038

IF: 11

2021-04-21

Research

Abstract:Sensors, capable of detecting trace amounts of gas molecules or volatile organic compounds (VOCs), are in great demand for environmental monitoring, food safety, health diagnostics, and national defense. In the era of the Internet of Things (IoT) and big data, the requirements on gas sensors, in addition to sensitivity and selectivity, have been increasingly placed on sensor simplicity, room temperature operation, ease for integration, and flexibility. The key to meet these requirements is the development of high-performance gas sensing materials. Two-dimensional (2D) atomic crystals, emerged after graphene, have demonstrated a number of attractive properties that are beneficial to gas sensing, such as the versatile and tunable electronic/optoelectronic properties of metal chalcogenides (MCs), the rich surface chemistry and good conductivity of MXenes, and the anisotropic structural and electronic properties of black phosphorus (BP). While most gas sensors based on 2D atomic crystals have been incorporated in the setup of a chemiresistor, field-effect transistor (FET), quartz crystal microbalance (QCM), or optical fiber, their working principles that involve gas adsorption, charge transfer, surface reaction, mass loading, and/or change of the refractive index vary from material to material. Understanding the gas-solid interaction and the subsequent signal transduction pathways is essential not only for improving the performance of existing sensing materials but also for searching new and advanced ones. In this review, we aim to provide an overview of the recent development of gas sensors based on various 2D atomic crystals from both the experimental and theoretical investigations. We will particularly focus on the sensing mechanisms and working principles of the related sensors, as well as approaches to enhance their sensing performances. Finally, we summarize the whole article and provide future perspectives for the development of gas sensors with 2D materials.

multidisciplinary sciences
Development of High Temperature Gas Sensor Technology

Gary W. Hunter,Liang-Yu Chen,Philip G. Neudeck,Dak Knight,C. C. Liu,Q. H. Wu,H. J. Zhou

DOI: https://doi.org/10.1115/97-gt-494

1997-01-01

Abstract:The measurement of engine emissions is important for their monitoring and control. However, the ability to measure these emissions in-situ is limited. We are developing a family of high temperature gas sensors which are intended to operate in harsh environments such as those in an engine. The development of these sensors is based on progress in two types of technology: 1) The development of SiC-based semiconductor technology. 2) Improvements in micromachining and microfabricarion technology. These technologies are being used to develop point-contact sensors to measure gases which are important in emission control especially hydrogen, hydrocarbons, nitrogen oxides, and oxygen. The purpose of this paper is to discuss the development of this point-contact sensor technology. The detection of each type of gas involves its own challenges in the fields of materials science and fabrication technology. Of particular importance is sensor sensitivity, selectivity, and stability in long-term, high temperature operation. An overview is presented of each sensor type with an evaluation of its stage of development. It is concluded that this technology has significant potential for use in engine applications but further development is necessary.
Gas Sensor Based on MEMS Technology

李珂,于世洁,尤政,赵嘉昊

DOI: https://doi.org/10.3969/j.issn.1000-9787.2008.11.002

2008-01-01

Abstract:The principles of gas sensors based on MEMS technology at home and abroad are summarized,which include resonate micro cantilever,SAW,conductor detect,photoacoustic spectroscopy,gas spectrum,catalytic combustion and FAIMS.The characteristics of all kinds of sensor are compared.
Recent Progress on Flexible Room-Temperature Gas Sensors Based on Metal Oxide Semiconductor

Lang-Xi Ou,Meng-Yang Liu,Li-Yuan Zhu,David Wei Zhang,Hong-Liang Lu

DOI: https://doi.org/10.1007/s40820-022-00956-9

IF: 26.6

2022-01-01

Nano-Micro Letters

Abstract:AbstractWith the rapid development of the Internet of Things, there is a great demand for portable gas sensors. Metal oxide semiconductors (MOS) are one of the most traditional and well-studied gas sensing materials and have been widely used to prepare various commercial gas sensors. However, it is limited by high operating temperature. The current research works are directed towards fabricating high-performance flexible room-temperature (FRT) gas sensors, which are effective in simplifying the structure of MOS-based sensors, reducing power consumption, and expanding the application of portable devices. This article presents the recent research progress of MOS-based FRT gas sensors in terms of sensing mechanism, performance, flexibility characteristics, and applications. This review comprehensively summarizes and discusses five types of MOS-based FRT gas sensors, including pristine MOS, noble metal nanoparticles modified MOS, organic polymers modified MOS, carbon-based materials (carbon nanotubes and graphene derivatives) modified MOS, and two-dimensional transition metal dichalcogenides materials modified MOS. The effect of light-illuminated to improve gas sensing performance is further discussed. Furthermore, the applications and future perspectives of FRT gas sensors are also discussed.
1D Metal Oxide Semiconductor Materials for Chemiresistive Gas Sensors: A Review

Bingxin Yang,Nosang V. Myung,Thien‐Toan Tran

DOI: https://doi.org/10.1002/aelm.202100271

IF: 6.2

2021-07-02

Advanced Electronic Materials

Abstract:<p>While numerous types of gas sensors have been developed for various industries and applications such as the automotive industry, environmental monitoring, and personal safety, nanoscale chemiresistive gas sensors have gained significant research interest due to several advantages such as high sensitivity, low power consumption, and portability. An essential component of these gas sensors is the sensing material where metal oxide semiconductor (MOS) materials are the most prevalent sensing material. Since the adoption of nanoscale synthesis methods for sensing materials development, such as electrospinning and hydrothermal synthesis, many novel 1D MOS-based nanostructured sensing materials have been demonstrated to enhance gas sensing performance. Overall, nanoengineering approaches and mechanisms for enhancement of gas sensing performance of 1D metal oxide-based sensing materials are systematically discussed and categorized into several overarching strategies, such as tuning of materials dimension, morphology, and composition. Furthermore, integration of 1D sensing nanomaterials into sensor devices are discussed from the perspective of different chemiresistive sensor architectures and device fabrication methods. Finally, this review also discusses use of 1D MOS materials for emerging and novel electronic nose applications.</p>

materials science, multidisciplinary,physics, applied,nanoscience & nanotechnology
Advances in Designs and Mechanisms of Semiconducting Metal Oxide Nanostructures for High-Precision Gas Sensors Operated at Room Temperature

Zhijie Li,Hao Li,Zhonglin Wu,Mingkui Wang,Jingting Luo,Hamdi Torun,PingAn Hu,Chang Yang,Marius Grundmann,Xiaoteng Liu,YongQing Fu

DOI: https://doi.org/10.1039/c8mh01365a

IF: 13.3

2019-01-01

Materials Horizons

Abstract:A comprehensive review on designs and mechanisms of semiconducting metal oxides with various nanostructures for room-temperature gas sensor applications.
Gas sensing materials roadmap

Huaping Wang,Jianmin Ma,Jun Zhang,Yuezhan Feng,Mani Teja Vijjapu,Saravanan Yuvaraja,Sandeep G Surya,Khaled N Salama,Chengjun Dong,Yude Wang,Qin Kuang,Zamaswazi P Tshabalala,David E Motaung,Xianghong Liu,Junliang Yang,Haitao Fu,Xiaohong Yang,Xizhong An,Shiqiang Zhou,Baoye Zi,Qingju Liu,Mario Urso,Bo Zhang,A A Akande,Arun K Prasad,Chu Manh Hung,Nguyen Van Duy,Nguyen Duc Hoa,Kaidi Wu,Chao Zhang,Rahul Kumar,Mahesh Kumar,Youngjun Kim,Jin Wu,Zixuan Wu,Xing Yang,S A Vanalakar,Jingting Luo,Hao Kan,Min Li,Ho Won Jang,Marcelo Ornaghi Orlandi,Ali Mirzaei,Hyoun Woo Kim,Sang Sub Kim,A S M Iftekhar Uddin,Jing Wang,Yi Xia,Chatchawal Wongchoosuk,Anindya Nag,Subhas Mukhopadhyay,Nupur Saxena,Pragati Kumar,Jing-Shan Do,Jong-Ho Lee,Seongbin Hong,Yujeong Jeong,Gyuweon Jung,Wonjun Shin,Jinwoo Park,Mara Bruzzi,Chen Zhu,Rex E Gerald 2nd,Jie Huang

DOI: https://doi.org/10.1088/1361-648X/abf477

2021-06-11

Abstract:Gas sensor technology is widely utilized in various areas ranging from home security, environment and air pollution, to industrial production. It also hold great promise in non-invasive exhaled breath detection and an essential device in future internet of things. The past decade has witnessed giant advance in both fundamental research and industrial development of gas sensors, yet current efforts are being explored to achieve better selectivity, higher sensitivity and lower power consumption. The sensing layer in gas sensors have attracted dominant attention in the past research. In addition to the conventional metal oxide semiconductors, emerging nanocomposites and graphene-like two-dimensional materials also have drawn considerable research interest. This inspires us to organize this comprehensive 2020 gas sensing materials roadmap to discuss the current status, state-of-the-art progress, and present and future challenges in various materials that is potentially useful for gas sensors.
Solid state gas sensor research in Germany - a status report

Ralf Moos,Kathy Sahner,Maximilian Fleischer,Ulrich Guth,Nicolae Barsan,Udo Weimar

DOI: https://doi.org/10.3390/s90604323

Abstract:This status report overviews activities of the German gas sensor research community. It highlights recent progress in the field of potentiometric, amperometric, conductometric, impedimetric, and field effect-based gas sensors. It is shown that besides step-by-step improvements of conventional principles, e.g. by the application of novel materials, novel principles turned out to enable new markets. In the field of mixed potential gas sensors, novel materials allow for selective detection of combustion exhaust components. The same goal can be reached by using zeolites for impedimetric gas sensors. Operando spectroscopy is a powerful tool to learn about the mechanisms in n-type and in p-type conductometric sensors and to design knowledge-based improved sensor devices. Novel deposition methods are applied to gain direct access to the material morphology as well as to obtain dense thick metal oxide films without high temperature steps. Since conductometric and impedimetric sensors have the disadvantage that a current has to pass the gas sensitive film, film morphology, electrode materials, and geometrical issues affect the sensor signal. Therefore, one tries to measure directly the Fermi level position either by measuring the gas-dependent Seebeck coefficient at high temperatures or at room temperature by applying a modified miniaturized Kelvin probe method, where surface adsorption-based work function changes drive the drain-source current of a field effect transistor.
The Development of Surface Acoustic Wave Sensor for Detecting Normal Gases

李晶晶,李冬梅,赵以贵,柯导明,陈军宁,贾锐

DOI: https://doi.org/10.3969/j.issn.1006-883x.2009.03.001

2009-01-01

Abstract:Surface acoustic wave (SAW) gas sensors are attractive because of their rapid response time, high sensitivity, small size, low cost, stability, etc. Emphasized particularly on sensitive material, the development of SAW sensor for detecting several harmful gases are introduced.
Designing State‐of‐the‐Art Gas Sensors: From Fundamentals to Applications

Muhammad Humayun,Mohamed Bououdina,Muhammad Usman,Abbas Khan,Wei Luo,Chundong Wang

DOI: https://doi.org/10.1002/tcr.202300350

IF: 6.935

2024-02-16

The Chemical Record

Abstract:In this review article, we discuss in detail the fundamentals of semiconductor gas sensing along with their mechanisms, the existed challenges and recent advancements in semiconductor gas sensor design for applications from different perspective. Gas sensors are crucial in environmental monitoring, industrial safety, and medical diagnostics. Due to the rising demand for precise and reliable gas detection, there is a rising demand for cutting‐edge gas sensors that possess exceptional sensitivity, selectivity, and stability. Due to their tunable electrical properties, high‐density surface‐active sites, and significant surface‐to‐volume ratio, nanomaterials have been extensively investigated in this regard. The traditional gas sensors utilize homogeneous material for sensing where the adsorbed surface oxygen species play a vital role in their sensing activity. However, their performance for selective gas sensing is still unsatisfactory because the employed high temperature leads to the poor stability. The heterostructures nanomaterials can easily tune sensing performance and their different energy band structures, work functions, charge carrier concentration and polarity, and interfacial band alignments can be precisely designed for high‐performance selective gas sensing at low temperature. In this review article, we discuss in detail the fundamentals of semiconductor gas sensing along with their mechanisms. Further, we highlight the existed challenges in semiconductor gas sensing. In addition, we review the recent advancements in semiconductor gas sensor design for applications from different perspective. Finally, the conclusion and future perspectives for improvement of the gas sensing performance are discussed.

chemistry, multidisciplinary
Smart Gas Sensors: Recent Developments and Future Prospective

Boyang Zong,Shufang Wu,Yuehong Yang,Qiuju Li,Tian Tao,Shun Mao

DOI: https://doi.org/10.1007/s40820-024-01543-w

IF: 26.6

2024-11-05

Nano-Micro Letters

Abstract:Highlights Recent developments of advanced electronic and optoelectronic gas sensors are introduced. Sensor array with artificial intelligence algorithms and smart gas sensors in "Internet of Things" paradigm are highlighted. Applications of smart gas sensors in environmental monitoring, medical and healthcare applications, food quality control, and public safety are described.

materials science, multidisciplinary,physics, applied,nanoscience & nanotechnology
Wo3-Based Gas Sensors

Xu Yuxing,Tan Qiangqiang,Tang Zilong,Zhang Zhongtai,Yuan Zhangfu

2009-01-01

Progress in chemistry

Abstract:Gas sensors have been extensively developed in biology, chemistry, aeronautics, military affairs. WO,based gas sensors have been characterized as one of the most promising neotype oxide gas sensors for the detection of H2S, NOx, O-3, NH3 and so on. An overview clarified by different sensing gases of the progress in WO3-based gas sensors has been presented systematically. Effects of preparation methods and noble metal dopants on gas sensing properties have been discussed in detail. Gas sensing mechanism of WO, gas sensor has been discussed in this paper. Finally, the problems existed during the research process of WO3-based gas sensors have been pointed out.
Review—Semiconductor Materials and Devices for Gas Sensors

Parameswari Raju,Qiliang Li

DOI: https://doi.org/10.1149/1945-7111/ac6e0a

IF: 3.9

2022-05-11

Journal of The Electrochemical Society

Abstract:Gas sensors are frequently used for detecting toxic gases and vapors for environmental control, industrial monitoring, and household safety. Semiconductor conductivity can be modified by doping or fine-tuned by applying an electric or magnetic field in an ultra-wide range (10-7 S/cm to 102 S/cm). The conduction of semiconductor is significantly raised or reduced upon the exposure to external conditions, such as temperature variation, light, heat, mechanical stress, or chemicals. Thus, semiconductors are excellent materials for sensors and the device structures are critical for sensing performance. The commonly used semiconductors materials include Si, Ge, III-V, and metal oxide semiconductors. Recently carbon-based materials gain signification attention due to their unique electrical, optical and mechanical properties. There are two major semiconductor gas sensors: resistor-based and FET-based sensors. In this review, the semiconductor materials, sensor device structure as well as gas sensing mechanisms will be systematically categorized, described and explored, with the focus on metal oxides, GaN, SiC, 2D-TMD and carbon-based gas sensors. The recent progress in new semiconductor gas sensors will be thoroughly reviewed and summarized, with a hope to show the trend in semiconductor gas sensor technology.

electrochemistry,materials science, coatings & films
Modeling Interfacial Interaction between Gas Molecules and Semiconductor Metal Oxides: A New View Angle on Gas Sensing

Chenyi Yuan,Junhao Ma,Yidong Zou,Guisheng Li,Hualong Xu,Victor V. Sysoev,Xiaowei Cheng,Yonghui Deng

DOI: https://doi.org/10.1002/advs.202203594

IF: 15.1

2022-09-21

Advanced Science

Abstract:Chemiresistive gas sensors are important sensing devices, whose operation matures from the interface interaction and heterogeneous catalysis between gas molecules and metal oxide semiconductors (MOS). Modeling the dynamic processes of gas molecules over porous sensitive MOS layers including gas adsorption, desorption, and diffusion, is a new and complementary view angle to understand gas sensing mechanism and develop high‐performance gas sensors. With the development of internet of things and artificial intelligence electronics, metal oxide semiconductor (MOS)‐based sensing materials have attracted increasing attention from both fundamental research and practical applications. MOS materials possess intrinsic physicochemical properties, tunable compositions, and electronic structure, and are particularly suitable for integration and miniaturization in developing chemiresistive gas sensors. During sensing processes, the dynamic gas–solid interface interactions play crucial roles in improving sensors' performance, and most studies emphasize the gas–MOS chemical reactions. Herein, from a new view angle focusing more on physical gas–solid interactions during gas sensing, basic theory overview and latest progress for the dynamic process of gas molecules including adsorption, desorption, and diffusion, are systematically summarized and elucidated. The unique electronic sensing mechanisms are also discussed from various aspects including molecular interaction models, gas diffusion mechanism, and interfacial reaction behaviors, where structure–activity relationship and diffusion behavior are overviewed in detail. Especially, the surface adsorption–desorption dynamics are discussed and evaluated, and their potential effects on sensing performance are elucidated from the gas–solid interfacial regulation perspective. Finally, the prospect for further research directions in improving gas dynamic processes in MOS gas sensors is discussed, aiming to supplement the approaches for the development of high‐performance MOS gas sensors.

materials science, multidisciplinary,nanoscience & nanotechnology,chemistry

Development of All Solid State Gas Sensors

Research Development of Electrochemical-Based Solid-State CO2 Sensor

The Research on the Gas Sensor Based on LAPS and Nanometer Porous Silicon

The Development of Gas Sensitive Polymer and Polymer Composite

The Development Of Several Normal Gas Sensors

Study and Developing Trend of Gas Sensors

Recent Development of Gas Sensing Platforms Based on 2D Atomic Crystals

Development of High Temperature Gas Sensor Technology

Gas Sensor Based on MEMS Technology

Recent Progress on Flexible Room-Temperature Gas Sensors Based on Metal Oxide Semiconductor

1D Metal Oxide Semiconductor Materials for Chemiresistive Gas Sensors: A Review

Advances in Designs and Mechanisms of Semiconducting Metal Oxide Nanostructures for High-Precision Gas Sensors Operated at Room Temperature

Gas sensing materials roadmap

Solid state gas sensor research in Germany - a status report

The Development of Surface Acoustic Wave Sensor for Detecting Normal Gases

Designing State‐of‐the‐Art Gas Sensors: From Fundamentals to Applications

Smart Gas Sensors: Recent Developments and Future Prospective

Wo3-Based Gas Sensors

Review—Semiconductor Materials and Devices for Gas Sensors

Modeling Interfacial Interaction between Gas Molecules and Semiconductor Metal Oxides: A New View Angle on Gas Sensing