Development of MEMS gas sensors equipped with metal organic frameworks
M. Ghommem,M. Hemid,B. Alattar,R. Sabouni,A. Elhady,Y.S. Shama,M. Arabi,E.M. Abdel-Rahman,M. Arab
DOI: https://doi.org/10.1016/j.sna.2024.115296
IF: 4.291
2024-03-28
Sensors and Actuators A Physical
Abstract:In this study, we investigate the potential usage of electrostatic MEMS resonators for CO 2 sensing. The MEMS sensor consists of two cantilever microbeams supporting a microplate coated with a Metal Organic Framework (MOF), namely ZIF-8. The detector material, ZIF-8, is synthesized using eco-friendly and sustainable production techniques and then deposited on the microplate to functionalize the sensor. An experimental setup, deploying the motion-induced current technique, is implemented and deployed to analyze the response of the gas sensor upon exposure to CO 2 . This method relies on a conversion mechanism that detects the motion of the sensor and translates it into a current signal. The experiments demonstrated the capability of the developed gas sensor to detect CO 2 . Motion-induced current measurements detected the nonlinear dynamic features of the sensor resulting from the presence of CO 2 in various concentrations. We show effective deployment of frequency and amplitude changes in peak output current as detectors for the presence of CO 2 and quantifiers of its concentration. Following the frequency-based approach, the sensor achieved a sensitivity of S=0.105 Hz/ppm. We also investigated a CO 2 sensing mechanism that relies on the sudden and significant increase in the current amplitude at the onset of bifurcation. This sensing mechanism reached a sensitivity of S=0.903 pA/ppm.
engineering, electrical & electronic,instruments & instrumentation