Development of Superhard Ti-Si-N Nanocomposite Coating

XU Ye,CAI Xun,CHEN Qiulong,SHEN Yao,LI Liuhe
DOI: https://doi.org/10.3969/j.issn.1003-5311.2006.08.001
2006-01-01
Abstract:With the increasing requirements on surface coating by modern industry, the research on Ti-Si-N coating has drawn much attention due to its unique nanocomposite microstructure, superhardness and other excellent mechanical properties. The preparation technology of Ti-Si-N film and influences of processing parameters on the microstructure and mechanical properties are introduced.
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