Low friction coefficient of superhard nc-TiC/a-C:H nanocomposite coatings deposited by filtered cathodic vacuum arc
J Luo,Y X Ou,Z Q Zhang,P Pang,L Chen,B Liao,H Z Shang,X Zhang,X Y Wu
DOI: https://doi.org/10.1088/2053-1591/ab2e9c
IF: 2.025
2019-07-10
Materials Research Express
Abstract:Nanocomposite coatings formed by metal (Ti, Al, Cr, etc)-doped diamond like carbon coatings can exhibit excellent tribological properties due to the combined improvement in hardness and toughness in optimized deposition conditions. In this work, Ti-doped a-C:H coatings are successfully deposited at C2H2 flow rate (f C2H2) of 50–250 sccm on Si (100) and AISI 304 L stainless steel substrates using filtered cathodic vacuum arc. Chemical bonding state, microstructure, and mechanical and tribological properties of Ti-doped a-C:H coatings were investigated using XPS, FESEM, nanoindentation and ball-on-disc tribometer, respectively. Nc-TiC/a-C:H nanocomposite coating with dense microstructure and smooth surface morphology are obtained at f C2H2 of 50–250 sccm thanks to high-efficiency magnetic filtered depositions. The sp2/sp3 ratio gradually decrease from 1.6 to 1.1, while (Ti–C)/(C–C) ratio shows a sharp decrease from 0.361 to 0.047. Hardness and H/E* and H3/E*2 ratios decrease from 41.2 GPa, 0.098 and 0.41 at 50 sccm to 22.9 GPa, 0.071 and 0.117 at 250 sccm, respectively. Residual stress ranges from −0.39 to −1.72 GPa. Superhard nc-TiC/a-C:H nanocomposite coating with the low residual stress, high H/E* and H3/E*2 exhibit low coefficient of friction of 0.07 and low wear rate of 5.4 × 10−9 mm3 N−1 m−1, which is ascribed to the high sp2/sp3 and (Ti–C)/(C–C) ratios, dense microstructure and smooth surface morphology.
materials science, multidisciplinary