Abstract:Undoped and Mg-doped ZnO thin films were deposited on Si(1 0 0) and quartz substrates by the sol-gel method. The thin films were annealed at 873 K for 60 min. Microstructure, surface topography and optical properties of the thin films have been measured by X-ray diffraction (XRD), atomic force microscope (AFM), UV-vis spectrophotometer, and fluorophotometer (FL), respectively. The XRD results show that the polycrystalline with hexagonal wurtzite structure are observed for the ZnO thin film with Mg:Zn = 0.0, 0.02, and 0.04, while a secondary phase of MgO is evolved for the thin film with Mg: Zn = 0.08. The ZnO: Mg-2% thin film exhibits high c-axis preferred orientation. AFM studies reveal that rms roughness of the thin films changes from 7.89 nm to 16.9 nm with increasing Mg concentrations. PL spectra show that the UV-violet emission band around 386-402 nm and the blue emission peak about 460 nm are observed. The optical band gap calculated from absorption spectra and the resistivity of the ZnO thin films increase with increasing Mg concentration. In addition, the effects of Mg concentrations on microstructure, surface topography, PL spectra and electrical properties are discussed. Crown Copyright (C) 2011 Published by Elsevier B. V. All rights reserved.

GROWTH OF MgO THIN FILMS ON Si SUBSTRATES BY MAGNETRON SPUTTERING

Influences of Pressure and Substrate Temperature on Epitaxial Growth of Γ-Mg 2 SiO 4 Thin Films on Si Substrates

Epitaxial Mg2SiO4 Thin Films with a Spinel Structure Grown on Si Substrates

Heteroepitaxial Growth of MgO Films by Dual Ion Beam Sputtering

Preparation and Characterization of Mg-doped ZnO Thin Films by Sol–gel Method

Characterizations of Cubic ZnMgO Films Grown on Si(111) at Low Substrate Temperature

Growth Dynamics Controllable Deposition of Homoepitaxial MgO Films on the IBAD-MgO Substrates

Microstructue and Optical Properties of Mg-doped ZnO Thin Films Prepared by Sol-gel Method

Growth of Cubic MgxZn1-xO Films and Characterization

Structural, morphological, optical and electrical characterization of MgO thin films grown by sputtering technique on different substrates

Influences of Pressure and Substrate Temperature on Epitaxial Growth of γ-Mg2SiO4 Thin Films on Si Substrates

Structure and Magnetic Properties of Γ′-Fe4n Films Grown on MgO-buffered Si (001)

Constriction of a lattice constant in an epitaxial magnesium oxide film deposited on a silicon substrate

Structural and Optical Studies of Mg(X)Zn(1-X)Ofilms Grown on Sapphire

Cubic Mgxzn1-Xo Films Grown on Si(111)

Selective Growth of (100)-, (110)-, and (111)-Oriented MgO Films on Si(100) by Pulsed Laser Deposition

Crystallographic Texture of MgO and its Effect on the Growth of BaTiO<sub>3</sub> Thin Films by RF Sputtering

Growth of Single-Crystalline, Atomically Smooth MgO Films on Ge(001) by Molecular Beam Epitaxy

Orientation of MgO thin films grown by pulsed laser deposition

Preparation of Epitaxial MgO Films Deposited by RF Magnetic Sputtering on the IBAD-MgO Substrate

Epitaxial Zn1−Mg O Films Grown on (1 1 1) Si by Pulsed Laser Deposition