Reliability Test and Evaluation Analysis of Silicon Pressure Sensor under Vibration Stress

Zhang Qingzhi,Bao Aida,Guo Tao,Sun Tao
DOI: https://doi.org/10.16526/j.cnki.11-4762/tp.2012.05.072
2012-01-01
Abstract:The silicon pressure sensor was taken as the object;in this paper,we built failure physics equation of sensor under the vibration stress based on the failure modes and failure mechanism of pressure sensor,and using vibration stress as the acceleration factor to process accelerated life testing under invariableness stress.The results show that failure physics equation of sensor yields the inverse power law relationship lnη=-6.46034-4.73856lnS.The estimated value of reliability character and accelerated life equation of sensor under the vibration stress was attained through analyzing testing data and the average life and reliable life of sensor has been attained through reliability evaluation were 53246 hour and 23248 hour,respectively.
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