Abstract:Due to the special fields of aerospace, explosion impact, weapon penetration, and other high-g value acceleration test, the sensor test range and antioverload capability have great requirements. At present, most accelerometer beams with equal Section are used. The existing data prove that the beam structure with variable Section can effectively solve the problem of stress concentration, improve the antioverload capability of acceleration sensor, and increase the system stability through theoretical simulation. This study presents a hybrid-integrated high-precision micro-electromechanical systems (MEMS) ultrahigh-g piezoresistive accelerometer, which is composed of a sensitive structure and an application-specific integrated circuit (ASIC) interface. Based on the traditional constant-section four-beam accelerometer, a variable-section beam is proposed, and the Section size increases linearly with the length of beam. Through finite-element simulation analysis, it is verified that the variable-section beam has the characteristics of reducing stress concentration and can improve the antioverload ability of the accelerometer. The simulation results show that the maximum stress of the structure under 200000 g is 28.34 MPa, and its resonance frequency is 548 kHz. Finally, the processing flow is designed, and the fabrication of MEMS chip is completed. Based on the Taiwan semiconductor manufacturing company (TSMC) 0.35- $mu ext{m}$ process, the ASIC interface is designed and fabricated to process the signal from the sensing element and realize the functions of amplification and filtering. The MEMS chip and ASIC chip are integrated by gold wire bonding, packaged in a stainless-steel shell, and tested by Hopkinson bar. The test results show that the sensitivity of the accelerometer is $0.2747 mu ext{V}$ /g, the nonlinearity is 2.79%, and the full range is 200000 g, and the antioverload capacity is 250000 g.

Silicon Micromachined High-Shock Accelerometers with a Curved-Surface-application Structure for Over-Range Stop Protection and Free-Mode-resonance Depression

Mechanical Design Optimization of A Single-Axis Moems Accelerometer Based on A Grating Interferometry Cavity for Ultrahigh Sensitivity

An In-Plane Low-Noise Accelerometer Fabricated with an Improved Process Flow

A silicon micromachined high-shock accelerometer with a bonded hinge structure

Design, fabrication and experiment of a MEMS piezoresistive high-g accelerometer

Design and experiment of high-overload capacitive micro-machined accelerometers

A high-g overload protected accelerometer with a novel microstructure

A Novel Hinged Micromachined High-G Piezoresistive Accelerometer

High-Performance Single-Side Fabricated (111)-Silicon Dual-Cantilever Accelerometer with Squeeze-Film Air Damping Modulation

Optimization design and shock calibration of pendulous high-g micro-machined accelerometer

Design, Fabrication and Test of a Low Range Capacitive Accelerometer With Anti-Overload Characteristics

Novel high-performance piezoresistive shock accelerometer for ultra-high-g measurement utilizing self-support sensing beams

Design, Manufacture And Test Of Novel Mems Piezoresistive Accelerometer For High G Application

Flexible Stop and Double-Cascaded Stop to Improve Shock Reliability of Mems Accelerometer

Shock resistance of MEMS capacitive accelerometers

A High-G Shock Tester with One-Level Velocity Amplifier

Design and Experiment of a Hybrid-Integrated Ultrahigh-g Accelerometer With Variable-Section Beam

A New Symmetrical Beam-Mass Structure for Accelerometers by Anisotropic Etching Without Convex Corner Compensation

Development of a MEMS Piezoresistive High-g Accelerometer with a Cross-Center Block Structure and Reliable Electrode

A Double-End Fixed Beam Structure of MEMS Piezoresistive High G Accelerometer

A Pendulous Micromachined Silicon Accelerometer