Tribology in Nanomanufacturing—Interaction between Nanoparticles and a Solid Surface

Jianbin Luo,Dan Guo

DOI: https://doi.org/10.1007/978-3-642-03653-8_3

2009-01-01

Abstract:Nanomanufacturing is a new area brought up in recent years, which is defined by NSF (The National Science Foundation, USA) as encompassing all processes aimed toward building of nanoscale (in ID, 2D, or 3D) structures, features, devices, and systems suitable for integration across higher dimensional scales (micro-, meso- and macroscale) to provide functional products and useful services. Nanomanufacturing includes both bottom-up and top-down processes. Tribology becomes very important in nanomanufacturing, particularly in process of chemical mechanical material removal, contact printing, assembly and joining, scanning probe lithography etc. In the present paper, the characteristic of liquids in a nano-gap, the collision, adsorption, and desorption of nano-particles with a solid surface, and the surface modification in nanofacturing have been discussed.