Movements and Collisions of Nanoparticles in Two Phase Flow

Jianbin Luo,Xuefeng Xu,Jing Yan,Fangli Duan,Xinchun Lu
DOI: https://doi.org/10.1115/wtc2005-63442
2005-01-01
Abstract:Nanoparticles have been widely used in oils and polish slurry such as chemical mechanical polish (CMP) process. The movement of nanoparticles in liquid and the interaction between nano-particles and solid surface are very important to obtain an atomic smooth surface in CMP process. This paper presents both experimental and theoretical studies on the movement of nanoparticles in fluid and the collision between nanoparticles as well as that between the particles and solid surfaces in two phases flowing process.
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