Automatically Generating Process Flows for an Electronic Manufacturing Automation System

YAN Liren

DOI: https://doi.org/10.3969/j.issn.1006-6055.2006.01.005

2006-01-01

Abstract:Techniques for a computer to automatically generate microstructure process flows are presented.Different microstructure devices are processed through different ways,and each of these ways contains,for example for a CMOS structure of moderate complexity,over a hundred process steps.Generally speaking,the researches on process flow generating techniques are quite difficult.A feasible process flow is suggested to be generated step by step.At first,the structure cell fabricating sequence can be determined by taking some priority rules into consideration.Each step in the sequence can then be expanded according to the definitions that are pre-stored in a proto type process library.The initial process flow is formed after connecting these expanded steps into a whole.The detailed process flow card,which can be adopted directly in practice,is finally generated after optimizing and setting process parameters for each step in the initial flow.