A Microstructure Description Language Defined for an Electronic Manufacturing Automation System

YAN Liren,CHEN Xiaocheng
DOI: https://doi.org/10.3969/j.issn.1006-6055.2005.06.001
2005-01-01
Abstract:A microstructure description language(MDL) is defined and discussed.Arbitrary microstructures,including ICs,MEMS,etc.,can all be described,and then fed into the electronic manufacturing automation(EMA) system.An electronic manufacturing automation system is such a conceptual system that it can independently manufacture products under various real time situations.After the description of an object to be fabricated being delivered to the EMA system,the system can analyze the device structure,extract the structure characteristics,and generate a process flow for the structure.A CMOS structure is utilized to show the advanced properties of the description language defined.As a result,all kinds of devices,including those to be invented,can be regarded as MDL instances,so that these devices can be dealt with in a systematic way.The work described here gathers necessary structural information and prepares the subsequent process flow generating.
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