MSDL:A Hierarchical Micro-Structure Description Language

YAN Li-ren,CHEN Xiao-cheng,DOU Wei-Zhi
DOI: https://doi.org/10.3969/j.issn.1004-3365.2005.03.007
2005-01-01
Abstract:MSDL,a micro-structure description language, which describes a device in 5 levels, is illustrated with an example of a sub-micron CMOS structure. Arbitrary micro-structures, including IC's, MEMS devices, etc, can be described with MSDL.Once a device is MSDL described, analyzing of the structure characteristics,checking of the structure for manufacturing, sequencing of process steps, and implementing of the fabrication process, can all be executed by a computer, or a computer controlled manufacturing system. So, MSDL can be regarded as an efficient tool to assist the development of new devices.
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