Determination of Trace Anions in the Tramerhylammonium Chloride by Ion Chromatography

Wang Wuping,Zhang Xinsheng
DOI: https://doi.org/10.3969/j.issn.1007-1865.2008.01.029
2008-01-01
Abstract:Tetramethylammonium hydroxide is used in cleaning semiconductor,but metal ions in its primary raw material tetramethylammonium chloride will affect product purity.A method for the determination of trace cations in the tetramethylammonium chloride was developed by ion chromatography(IC) with conductivity detector.In chosen chromatography,complex treatment to the sample was not necessary,sample was direct in and detected by conductivity detector.This method had better linery relation,RSDs of the peak area of analytes were lower than 3 %.The recoveries of added standard were 86.2 %~105.5 %.Detection limits of analytes were lower than 0.13 ppb,the operation was simple and accuracy.
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