Abstract:In this paper we use density-functional theory calculations to analyze both the stability and diffusion of Cu adatoms near and on the H-passivated Si(001) surface. Two different Cu sources are considered: depositing Cu from vacuum, and contaminating Cu outdiffusing from bulk Si. Deposited Cu from vacuum quickly moves subsurface to an interstitial site in the third Si layer (T2). Once there, Cu adatoms enter a subsurface zigzag migration route between T2 and another subsurface site, T2->HSL->T2, along the dimer row direction. Contaminating Cu outdiffusing from bulk is found to be a fast diffuser along both parallel and perpendicular directions to the dimer row when far from the surface. It is attracted to the layers close to the surface and becomes trapped at an interstitial site located at the sixth Si layer (T3). As the outdiffusing Cu atoms get closer to the surface, a channeling zigzag diffusion along the dimer row direction, similar to that one followed by deposited Cu from vacuum, is favoured over diffusion along the perpendicular direction. These results are consistent with previous experimental work done on similar systems and will motivate further experiments on the interesting interaction between Cu and Si surfaces.

MOLECULAR DYNAMICS SIMULATIONS OF SINGLE Si ADATOM DIFFUSION ON THE Si(001) SURFACE AND ACROSS SINGLE-LAYER Si(001) STEPS

Dimer-Flipping-Assisted Diffusion on A Si(001) Surface

Atomistic modeling of diffusion processes at Al(Si)/Si(111) interphase boundaries obtained by vapor deposition

INTERACTION BETWEEN Li ATOMS ON Si(100)2×1 AND PHASE CHANGE OF SURFACE STRUCTURE

Molecular Dynamics Simulations of Various Metastable Structures on Si(001) at Different Temperatures

ATOMIC LEVEL STUDIES OF THE DYNAMICS AND DYNAMICAL BEHAVIOR OF SOLID SURFACES

Self-Diffusion Mechanisms of Adatom on Al (001), (011) and (111) Surfaces

First-principles Study of Adsorption and Diffusion on Ge/Si(001)-(2×8) and Ge/Si(105)-(1×2) Surfaces

Adatom Self-Diffusion on Pt (100) Surface by an Ad-Dimer Migrating

Simulation of Dimer Diffusion on Metal Fcc (001) Surfaces by Molecular Dynamics

Ab initio study of subsurface diffusion of Cu on the H-passivated Si(001) surface

Precursor Mechanism for Interaction of Bulk Interstitial Atoms with Si(100)

A MOLECULAR DYNAMICS STUDY OF SELF-DIFFUSION ON Ag(100) SURFACE

Exchange Rotation Mechanism For Dimer Diffusion On Metal Fcc (001) Surfaces

Molecular Dynamics Simulation of Gd Adatom Diffusion on Cu Low Index Surfaces

Systematical Study of Dimer Diffusion on Metal Fcc(001) Surfaces

Ab Initio Calculation of Diffusion Barriers for Cu Adatom Hopping on Cu(1 0 0) Surface and Evolution of Atomic Configurations

Mechanisms for adatoms diffusing on metal fcc(111) surfaces

Molecular Dynamics Simulation on Vacancy-interstitial Annihilation in Silicon

Theoretical Study Of Adatom Self-Diffusion On Metallic Fcc {001} Surfaces

Exchange Mechanism for Adatom Diffusion on Metal Fcc(100) Surfaces