Effect of Oxygen Ratio and Sputtering Poweron on Photoelectric Performance of WO_3 Films

XU Ying,YANG Xin,LIU Shang-jun,JIANG Chun-ping,KANG Hong,GAO Zi-chen,CHEN Jin-wei,WANG Rui-lin
DOI: https://doi.org/10.3969/j.issn.1001-9677.2012.05.030
2012-01-01
Abstract:WO3 films with strong adhesion,good smooth,uniform photoelectric character were prepared on the FTO substrates by reactive sputtering.The effect of Ar:O2 ratio and sputtering power on photoelectric(PEC) performance was studied.The physics phase,morphology and PEC properties of the films was characterized by XRD,AFM,and Mott-Schottky(MS).The incident photo to current efficient(IPCE) test showsed that WO3 film had the best PEC performance when prepared with the flow of Ar:O2=2 and 250 W sputtering power.The IPCE value was as high as 40% at 400 nm wavelength.
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