Abstract:Ferroelectric thin film is the target of the interest in micro electromechanical system, memory etc. Smart MEMS is to be developed with such smart materials thin films. In spite of the success in commercialization of FRAM application, MEMS application is still under R&D state. Despite to their promising properties, there are only few reports on the use of such layers as MEMS devices. Problems for application are mainly caused by the necessary very small dimension of such devices, in contrast to limitations and tolerances of the used micro-technologies. Although deposition of piezoelectric PZTlayer using different thin-film technologies has reached an advanced state, the layers of more than 1 micron thickness needed for MEMS applications is still difficult to deposit. To deal with these problems, the structure or the function of the devices has to be coped with such technologically caused constraints, like thickness deviation and deformation by residual stress, as well as optimization of materials processing parameters. As an application of the thin films, Piezoelectric SFM and scanning mirror device are designed and fabricated as examples of the target MEMS devices with special emphases placed on materials, processing and device structure optimization. Sol gel deposited as well as Pulsed Laser Ablation Deposited PZT layers have been developed and applied for the devices. To compensate the deformation of the devices, bimorph PZT actuator is also presented. A piezoelectric SPM is expected to provide a promising answer to High density data storage devices, as the piezoelectric layer serves as a actuator for the cantilever as well as a force sensor. This paper describes a novel probe arrays integrated with micro-heaters for the AFM thermal mechanical data storage. The probes have cantilevers 3um thick, 100-200um long, and 30-70um wide, and have micro-heater integrated on the triangle end of the cantilever. The cantilever consists of a piezoelectric layer on a silicon base for the heater actuation and force sensing. The Lead-Titanate-Zirconate (PZT) is selected as the piezoelectric material for its high piezoelectric coefficients comparing to crystal materials (for example, ZnO2). We design the heater on the triangle end of the cantilever, and shape the apex part as the narrowest to get the biggest power dissipation. The prototype of the device has been fabricated and characterized.

High Performance PZT Piezoelectric Thick Films and Micro-Technology Research of MEMS Microactuator

Research of Microactuator with PZT Prepared by Sol-gel

Micro-Fabrication Technology for Piezoelectric Film Formationand its Application to MEMS

Fabrication and characterization of MEMS piezoelectric synthetic jet actuators with bulk-micromachined PZT thick film

Fabrication and Characterization of Microcantilever Integrated with PZT Thin Film Sensor and Actuator

Excellent Uniformity and Properties of Micro-Meter Thick Lead Zirconate Titanate Coatings with Rapid Thermal Annealing

Preparation of A High-Quality Pzt Thick Film with Performance Comparable to Those of Bulk Materials for Applications in Mems

Applications of PZT Pieoelectric Thin Films in Microsensors

Study on technology of zinc oxide piezoelectric thin film device with surface micromachining substrate

Fabrication and Characterization of PZT Thick Film Actuators Array for MEMS Deformable Mirror

High Quality PZT Thick Films Using Silicon Mold Technique for MEMS Applications

A Novel Design and Fabrication of V Type Valve Microactuator with PZT Prepared by Sol-Gel

Fabrication and Characterization of Piezoelectric Cantilever for Micro Transducers

Process Research of Microactuator with Sputtering PZT Film

Preparation and Properties of Piezoelectric Elements by Sol-Gel Process for Micro-actuator Application

Study of nano-PZT thick film for MEMS application

Deposition and Patterning Technique for Realization of Pb(Zr0.52, Ti0.48)O3 Thick Film Micro Actuator

Deposition and Patterning Technique for Realization of PZT Thick Film Micro Actuator

Preparation and Micro-fabrication of PZT Piezoelectric Thin Film for Micro-sensor

Low Thermal Budget Lead Zirconate Titanate Thick Films Integrated on Si for Piezo-Mems Applications

&Lt;title>ferroelectric Pb(Zr<formula><inf><roman>0.53</roman></inf></formula>, Ti<formula><inf><roman>0.47</roman></inf></formula>)O<formula><inf><roman>3</roman></inf></formula> Thin Films for Smart MEMS</title>