Abstract:We report the formation of cubic phase, under ambient conditions, in thin films of Zirconia synthesized by electron beam evaporation technique. The stabilization of the cubic phase was achieved without the use of chemical stabilizers and/or concurrent ion beam bombardment. Films of two different thickness (660 nm, 140 nm) were deposited. The 660 nm and 140 nm films were found to be stoichiometric (ZrO2) and off-stoichiometric (ZrO1.7) respectively by Resonant Rutherford back-scattering spectroscopy. While the 660 nm as-deposited films were in the cubic phase, as indicated by X-ray diffraction and Raman spectroscopy measurements, the 140 nm as-deposited films were amorphous and the transformation to cubic phase was obtained after thermal annealing. Extended X-ray absorption fine structure measurements revealed the existence of Oxygen vacancies in the local structure surrounding Zirconium for all films. However, the amount of these Oxygen vacancies was found to be significantly higher for the amorphous films as compared to the films in the cubic phase (both 660 nm as-deposited and 140 nm annealed films). The cubic phase stabilization is explained on the basis of suppression of the soft X2- mode of vibration of the Oxygen sub-lattice due to the presence of the Oxygen vacancies. Our first-principles modeling under the framework of density functional theory shows that the cubic structure with Oxygen vacancies is indeed more stable at ambient conditions than its pristine (without vacancies) counterpart. The requirement of a critical amount of these vacancies for the stabilization of the cubic phase is also discussed.

Study of the Structure and Optical Properties of Nanocrystalline Zirconium Oxide Thin Films Deposited at Low Temperatures

Formation and Rate Processes of Y2o3 Stabilized Zro2 Thin Films from Zr(Dpm)(4) and Y(Dpm)(3) by Cold-Wall Aerosol-Assisted Mocvd

ZrO2 Films Deposited by Photo-Cvd at Low Temperatures

The Effects of Oxygen Partial Pressure and Substrate Temperature on the Structural and Optical Properties of Zno Films

Mechanical Properties Of Zirconia Thin Films Deposited By Filtered Cathodic Vacuum Arc

STRUCTURAL AND OPTICAL STUDIES OF ZnO FILMS GROWN AT LOW TEMPERATURE

Interfacial and microstructural properties of zirconium oxide thin films prepared directly on silicon

X-ray Diffraction and Electrical Characterization of Photo-Cvd Zirconium Oxide Layers

Comparison of Structural and Optical Properties of ZnO Films Grown on Different Substrates at Low Temperatures

Infrared And Raman Spectroscopic Studies Of Optically Transparent Zirconia (Zro2) Films Deposited By Plasma-Assisted Reactive Pulsed Laser Deposition

Effects of substrate temperature on structure, thermal stability and mechanical property of a Zr-based metallic glass thin film

Optimization of molar concentrations for enhanced crystallinity and bandgap tuning of ZrO2 thin films via spray pyrolysis for advanced optical applications

Microstructures and Optical Properties of Nanocrystalline Rare Earth Stabilized Zirconia Thin Films Deposited by a Simple Sol–gel Method

Substrate Temperature Dependence of Properties of Zno Thin Films Deposited by Lp-Mocvd

Deposition Of High K Zro2 Thin Films By High Vacuum Electron Beam Evaporation At Room Temperature

Oxygen vacancy mediated cubic phase stabilization at room temperature in pure nano-crystalline Zirconia films: A combined experimental and first-principles based investigation

Investigation of electrical, corporeal, ocular, and aquaphobic properties of zirconia thin-films by varying substrate temperature for high voltage insulators

Thickness Dependence of the Crystallization and Phase Transition in ZrO 2 Thin Films

Deposition of high k ZrO/sub 2/ thin films by high vacuum electron beam evaporation at room temperature

Low-Temperature C-Axis Oriented Growth of Nanocrystalline Zno Thin Films on Si Substrates by Plasma Assisted Pulsed Laser Deposition

Investigation into Texture, Preferential Orientation, and Optical Properties of Zinc Oxide Nanopolycrystalline Thin Films Deposited by the Sol–Gel Technique on Different Substrates